VOLTA

Products

Platform System

Platform System

Platform
System

A high-precision transfer platform that drives automation and efficiency in semiconductor processes.

Cluster Platform System
  • 3 ~ 5P EFEM & N2 Circulation
  • 4 ~ 8 Facet Transfer Module
  • PM Long Reach & high-temperature capability
  • Easy maintenance & leveling
  • High precision (repeatability, AWC)
  • Customization to meet customer requirements
  • SEMI Standard
Twin Platform System
  • 3 ~ 5P EFEM & N2 Circulation
  • 4 Facet Transfer Module (6 PM. 2 L/L)
  • Individual Arm & high-temperature capability
  • Easy maintenance & leveling
  • High precision (repeatability, AWC)
  • Customization to meet customer requirements
  • SEMI Standard
In-Line Platform System
  • 3 ~ 5P EFEM & N2 Circulation
  • 4 ~ 12(6+6) Chamber Linear type
  • PM Long Reach & high-temperature capability
  • Easy maintenance & leveling
  • High precision (repeatability, AWC)
  • Customization to meet customer requirements
  • SEMI Standard

EFEM System

Automated wafer transfer and precise alignment that raise productivity and cleanliness.

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COSMO-UNIVAC Series : High-cleanliness specification, small footprint
  • 200/300mm wafer transfer system (2–5 Wide)
  • ‌‌Auto teaching, AWC and self-diagnosis
  • YASKAWA ATM Robot for proven reliability
  • ‌Customization to meet customer requirements
  • Easy maintenance and leveling
  • ‌‌SEMI Standard

Transfer Module

The core unit that automatically transfers wafers between process chambers.

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COSMO-UNIVAC Series : High-vacuum level and high throughput
  • Easy maintenance and leveling
  • ‌Customization to meet customer requirements
  • AWC and self-diagnosis (with our own robots)
  • SEMI Standard
VOLTA AUTOMATION
Online Inquiry

For technical documentation or questions about this product, please submit an online inquiry.

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