Products
Vacuum Robot
Vacuum Robot
Vacuum Robot
Series
For In Cluster Backbone
- Compatible with 4- to 8-facet clusters
- Minimal swing radius with long reach
- DD Motor and Can Seal
- Repeatability / AWC accuracy ± ≤ 50㎛
For In Twin Backbone
- 4 to 7 axes available
- 2 to 4 hands operating independently
- DD Motor and Can Seal
- Repeatability / AWC accuracy ± ≤ 50㎛
Precise, high-speed wafer transfer in high-vacuum environments.
- AWC and self-diagnosis
- High-vacuum and high-cleanliness specifications
- YASKAWA DD motor and controller
- SEMI Standard
- A range of arm types, customizable to customer needs
Benefits of the
DD Motor
| Category | Conventional vacuum robot | Vacuum robot with DD motor |
|---|---|---|
| Drive structure | Servo motor + reducer + vacuum seal | Integrated DD motor for vacuum use |
| Reducer | Required (backlash and vibration) | Not required (direct drive, high precision) |
| Vacuum seal | Rotary seal required (maintenance, friction) | Integrated seal (built-in structure, minimal friction) |
| Precision and responsiveness | Limited by the reducer | High precision, high responsiveness |
| Structural simplicity | Complex (many components) | Simple (integrated motor) |
| Maintainability | Reducer and vacuum seal inspections required | Minimal maintenance |
For In Cluster
Backbone
COSMO-GEKKO-VDK31HDA
The VDK31HDA is a vacuum robot suited to general use in 5- and 6-facet clusters.
- Wafer Size : 200/300 mm
- ARM Reach : CTC 1094 mm
- 4 Axes
- DD Motor & Can Seal
- AWC Accuracy : ± ＜ 50 ㎛
COSMO-GEKKO-VDK31HDM
The VDK31HDM features a minimal swing radius and supports 4- and 5-facet clusters.
- Wafer Size : 200/300 mm
- ARM Reach : CTC 750 mm
- 4 Axes
- DD Motor & Can Seal
- Swing Dia : 550
- AWC Accuracy : ± ＜ 50 ㎛
For In Twin
Backbone
COSMO-GEKKO-VDK31HBA
The VDK31HBA is a long-reach type for cluster chambers, offering exceptional reach relative to its swing radius.
- Wafer Size : 200/300 mm
- ARM Reach : CTC 1324 mm
- 4 Axes
- DD Motor & Can Seal
- AWC Accuracy : ± ＜ 50 ㎛
COSMO-GEKKO-VDK61HQI
The VDK61HQI is mounted in twin-chamber transfer modules and is built with four independent arms.
- Wafer Size : 200/300 mm
- ARM Reach : CTC 970 mm
- 7 Axes
- DD Motor & Can Seal
- AWC Accuracy : ± ＜ 50 ㎛
VOLTA AUTOMATION
Online Inquiry
For technical documentation or questions about this product,
please submit an online inquiry.