Products
EFEM System
EFEM System
EFEM System
Automated wafer transfer and precise alignment that raise productivity and cleanliness.
COSMO-UNIVAC Series : High-cleanliness specification, small footprint
- 200/300mm wafer transfer system (2–5 Wide)
- Auto teaching, AWC and self-diagnosis
- YASKAWA ATM Robot for proven reliability
- Customization to meet customer requirements
- Easy maintenance and leveling
- SEMI Standard
EFEM System Configuration
LPM - VOLTA
- Std. Type
- N2 Type
- Shield Type
- Customizing
- Easy Maintenance
- Ultra-Cleanness
- Anti-Corrosion
ATM Robot - YASKAWA
- Edge Grip
- Vacuum Grip
- Passive Grip
- Abs. Servo Motor & DD Motor
- Z Long Reach (Max. 805mm)
- High Throughput (X-Y 2,000mm/s)
- Controller SR200
- Auto Teaching
Aligner - YASKAWA
- Vacuum Grip
- Passive Grip
- Wafer Material: Silicon or Quartz
- Wafer Detection
- CCD Line Sensor
- Easy Maintenance
- Very Simplification
- Controller (SR200 all-in-one)
Option - VOLTA
- Customizing
- Buffer Station
- Side Storage
- Wafer Backside
- Anti-Scratch System
VOLTA AUTOMATION
Online Inquiry
For technical documentation or questions about this product,
please submit an online inquiry.