Products
Transfer Module
Transfer Module
Transfer Module
The core unit that automatically transfers wafers between process chambers.
COSMO-UNIVAC Series : High-vacuum level and high throughput
- Easy maintenance and leveling
- Customization to meet customer requirements
- AWC and self-diagnosis (with our own robots)
- SEMI Standard
Transfer Module Configuration
Load Lock - VOLTA
- Stack & Batch
- Customizing
- Cool / Heat Etc.
- Micro Volume (Quick Pumping / Vent)
- Up / Down Drive
- Abs. Servo Motor
TM Chamber - VOLTA
- 4-8 Facet & Twin Chamber
- Customizing
- Top Lid Full View Port (Dome Type)
- High VAC.
VAC. ROBOT - VOLTA
- Customizing
- Cluster Type
- Linear Type
- without Vac. Seal
- Abs. DD Motor
- High Throughput
- Controller SR200 (ATM Robot same)
- High Payload (Edge Ring)
- High Accuracy (AWC < 50μm)
VOLTA AUTOMATION
Online Inquiry
For technical documentation or questions about this product,
please submit an online inquiry.